Characterization of Ion Energy Distribution in Inductively Coupled Argon Plasmas Sustained with Multiple Internal-Antenna Units
- 期刊名称Japanese Journal of Applied Physics
- 作者Takenaka, Kosuke; Setsuhara, Yuichi; Nishisaka, Kazuaki; Ebe, Akinori
- 卷第47卷
- 期第8期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小114.16KB
- 发表时间2008-8-22
- DOI10.1143/JJAP.47.6900
- 页码6900-6902
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