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[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Low actuation voltage totally free flexible RF MEMS switch with antistiction system

[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Low actuation voltage totally free flexible RF MEMS switch with antistiction system

Touati, S.; Lorphelin, N.; Kanciurzewski, A.; Robin, R.; Rollier, A.-S.; Millet, O.; Segueni, K.

作者Touati, S.; Lorphelin, N.; Kanciurzewski, A.; Robin, R.; Rollier, A.-S.; Millet, O.; Segueni, K.
文件大小4233.25KB
发表时间2008
DOI10.1109/dtip.2008.4752954
页码66-70

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