Local strain distributions in silicon-on-insulator/stressor-film composites
- 期刊名称Journal of Applied Physics
- 作者Kalenci, Özgür; Murray, Conal E.; Noyan, I. C.
- 卷第104卷
- 期第6期
- 印刷ISSN0021-8979
- 文件大小743.17KB
- 发表时间2008
- DOI10.1063/1.2975992
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