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[IEEE 2008 Winter Simulation Conference (WSC) - Miami, FL, USA (2008.12.7-2008.12.10)] 2008 Winter Simulation Conference - Determining an appropriate number of FOUPs in semiconductor wafer fabrication facilities

[IEEE 2008 Winter Simulation Conference (WSC) - Miami, FL, USA (2008.12.7-2008.12.10)] 2008 Winter Simulation Conference - Determining an appropriate number of FOUPs in semiconductor wafer fabrication facilities

Zimmermann, Jens; Mason, Scott J.; Fowler, John W.; Monch, Lars

作者Zimmermann, Jens; Mason, Scott J.; Fowler, John W.; Monch, Lars
文件大小520.55KB
发表时间2008
DOI10.1109/wsc.2008.4736315
页码2164-2170

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