[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Annealing effect on the microstructure and morphology of the nanostructured Ta-Si-N thin films
- 作者Chung, C. K.; Chen, T. S.; Peng, C. C.; Wu, B. H.
- 文件大小237.30KB
- 发表时间2008
- DOI10.1109/nems.2008.4484486
- 页码982-985
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