Laser copper plasma X-ray source debris characterization

Dryver Huston; Brent Boerger; Robert Selzer; David Hurley; Shan Garcia; Brian Grenon

作者Dryver Huston; Brent Boerger; Robert Selzer; David Hurley; Shan Garcia; Brian Grenon
卷第85卷
印刷ISSN0167-9317
文件大小290.06KB
发表时间2008
DOI10.1016/j.mee.2007.12.033
页码734-737

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