Nanoscale strain characterisation for ultimate CMOS and beyond
Sarah H. Olsen; Peter Dobrosz; Rouzet M.B. Agaiby; Yuk Lun Tsang; Olayiwola Alatise; Stephen J. Bull; Anthony G. O’Neill; Kirsten E. Moselund; Adrian M. Ionescu; Prashant Majhi; Dan Buca; Siegfried Mantl; Howard Coulson
- 作者Sarah H. Olsen; Peter Dobrosz; Rouzet M.B. Agaiby; Yuk Lun Tsang; Olayiwola Alatise; Stephen J. Bull; Anthony G. O’Neill; Kirsten E. Moselund; Adrian M. Ionescu; Prashant Majhi; Dan Buca; Siegfried Mantl; Howard Coulson
- 卷第11卷
- 印刷ISSN1369-8001
- 文件大小999.71KB
- 发表时间2008
- DOI10.1016/j.mssp.2009.06.003
- 页码271-278