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Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon

Wirbeleit, Frank; Pedrero, Victoria; Thron, Dominik; Stephan, Rolf; Schwalke, Udo

期刊名称MRS Proceedings
作者Wirbeleit, Frank; Pedrero, Victoria; Thron, Dominik; Stephan, Rolf; Schwalke, Udo
卷第1074卷
电子ISSN1946-4274
文件大小325.92KB
发表时间2008-1
DOI10.1557/PROC-1074-I03-11