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Temperature-dependent thermomechanical noise spectra of doped silicon microcantilevers

Temperature-dependent thermomechanical noise spectra of doped silicon microcantilevers

Jungchul Lee; Fabian Goericke; William P. King
  • 作者Jungchul Lee; Fabian Goericke; William P. King
  • 印刷ISSN0924-4247
  • 文件大小1157.34KB
  • 发表时间2008
  • DOI10.1016/j.sna.2007.10.028
  • 页码37-43
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