Wide area polycrystalline diamond coating and stress control by sp3 hot filament CVD reactor
Jerry W. Zimmer; Gerry Chandler; Tarun Sharda
- 作者Jerry W. Zimmer; Gerry Chandler; Tarun Sharda
- 卷第516卷
- 期第5期
- 印刷ISSN0040-6090
- 文件大小395.05KB
- 发表时间2008
- DOI10.1016/j.tsf.2007.06.050
- 页码696-699