Hot-wire deposition of a-Si:H thin films on wafer substrates studied by real-time spectroscopic ellipsometry and infrared spectroscopy

• 作者P.J. van den Oever; J.J.H. Gielis; M.C.M. van de Sanden; W.M.M. Kessels
• 卷第516卷
• 期第5期
• 印刷ISSN0040-6090
• 文件大小913.66KB
• 发表时间2008
• DOI10.1016/j.tsf.2007.06.092
• 页码511-516