Cleaning technology for EUV multilayer mirror using atomic hydrogen generated with hot wire
- 作者Kumi Motai; Hiroaki Oizumi; Shinji Miyagaki; Iwao Nishiyama; Akira Izumi; Tomoya Ueno; Akira Namiki
- 卷第516卷
- 期第5期
- 印刷ISSN0040-6090
- 文件大小372.79KB
- 发表时间2008
- DOI10.1016/j.tsf.2007.06.182
- 页码839-843