Design and Evaluation of Pad Grooves for Copper CMP
- 期刊名称Journal of The Electrochemical Society
- 作者Rosales-Yeomans, D.; DeNardis, D.; Borucki, L.; Philipossian, A.
- 卷第155卷
- 期第10期
- 印刷ISSN0013-4651
- 文件大小535.41KB
- 发表时间2008
- DOI10.1149/1.2963268
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