Damage-free surface treatment of carbon nanotubes and self-assembled monolayer devices using a neutral beam process for fusing top–down and bottom–up processes
S. Samukawa; Y. Ishikawa; K. Okumura; Y. Sato; K. Tohji; T. Ishida
- 作者S. Samukawa; Y. Ishikawa; K. Okumura; Y. Sato; K. Tohji; T. Ishida
- 文件大小414.09KB
- 发表时间2008
- DOI10.1088/0022-3727/41/2/024006