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Damage-free surface treatment of carbon nanotubes and self-assembled monolayer devices using a neutral beam process for fusing top–down and bottom–up processes

Damage-free surface treatment of carbon nanotubes and self-assembled monolayer devices using a neutral beam process for fusing top–down and bottom–up processes

S. Samukawa; Y. Ishikawa; K. Okumura; Y. Sato; K. Tohji; T. Ishida
  • 作者S. Samukawa; Y. Ishikawa; K. Okumura; Y. Sato; K. Tohji; T. Ishida
  • 文件大小414.09KB
  • 发表时间2008
  • DOI10.1088/0022-3727/41/2/024006
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