Positioning of Large-Scale High-Precision Stage with Vibration Suppression PTC
- 期刊名称IFAC Proceedings Volumes
- 作者Sakata, Koichi; Fujimoto, Hiroshi; Saiki, Kazuaki
- 卷第41卷
- 期第2期
- 印刷ISSN1474-6670
- 文件大小667.73KB
- 发表时间2008
- DOI10.3182/20080706-5-kr-1001.00531
- 页码3124-3129
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