SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Sensors 2008 - A compact high-sensitivity heterodyne interferometer for industrial metrology
- 作者Schuldt, Thilo; Berghmans, Francis; Mignani, Anna G.; Gohlke, Martin; Weise, Dennis; Cutolo, Antonello; Meyrueis, Patrick P.; Peters, Achim; Johann, Ulrich; Pearsall, Thomas P.; Braxmaier, Claus
- 卷第7003卷
- 印刷ISSN0277-786X
- 文件大小802.41KB
- 发表时间2008
- DOI10.1117/12.781336
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