[IEEE 2008 International Conference on Perspective Technologies and Methods in MEMS Design - Lviv, Ukraine (2008.05.21-2008.05.24)] 2008 International Conference on Perspective Technologies and Methods in MEMS Design - Contents
- 文件大小91.36KB
- 发表时间2008
- DOI10.1109/memstech.2008.4558722
- 页码9-11
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