SPIE Proceedings [SPIE Fourth International Symposium on Precision Mechanical Measurements - Anhui, China (Monday 25 August 2008)] Fourth International Symposium on Precision Mechanical Measurements - Error analysis of 2-D diffraction grating interferometer for high-resolution displacement measurement
Xia, Haojie; Fei, Yetai; Fan, Kuang-Chao; Fei, Yetai; Zhang, Mei; Lu, Rongsheng
- 作者Xia, Haojie; Fei, Yetai; Fan, Kuang-Chao; Fei, Yetai; Zhang, Mei; Lu, Rongsheng
- 卷第7130卷
- 印刷ISSN0277-786X
- 文件大小344.26KB
- 发表时间2008
- DOI10.1117/12.819742