Spectroscopic ellipsometry and photoluminescence measurements of as-deposited and annealed silicon rich oxynitride films
- 作者Sandeep Kohli; Jeremy A. Theil; Patrick R. McCurdy; Patricia C. Dippo; Richard K. Ahrenkiel; Christopher D. Rithner; Peter K. Dorhout
- 卷第516卷
- 期第12期
- 印刷ISSN0040-6090
- 文件大小930.24KB
- 发表时间2008
- DOI10.1016/j.tsf.2007.12.119
- 页码4342-4350
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