Obtaining high-purity chemical materials for chemical, plasmachemical, and pyrolytic deposition of thin oxide films
- 期刊名称jot/76/8/jot-76-8-478.pdf
- 作者Potelov, V. V.
- 卷第76卷
- 期第8期
- 印刷ISSN1070-9762
- 文件大小81.99KB
- 发表时间2009
- DOI10.1364/JOT.76.000478
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