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[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Design of Power-Optimized Thermal Cantilevers for Scanning Probe Topography Sensing

[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - Design of Power-Optimized Thermal Cantilevers for Scanning Probe Topography Sensing

Rothuizen, H.; Despont, M.; Drechsler, U.; Hagleitner, C.; Sebastian, A.; Wiesmann, D.
  • 作者Rothuizen, H.; Despont, M.; Drechsler, U.; Hagleitner, C.; Sebastian, A.; Wiesmann, D.
  • 文件大小3926.16KB
  • 发表时间2009
  • DOI10.1109/MEMSYS.2009.4805454
  • 页码603-606
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