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Characterization of specific contact resistance on heavily phosphorus-doped diamond films

Kato, Hiromitsu; Takeuchi, Daisuke; Tokuda, Norio; Umezawa, Hitoshi; Okushi, Hideyo; Yamasaki, Satoshi

期刊名称Diamond and Related Materials
作者Kato, Hiromitsu; Takeuchi, Daisuke; Tokuda, Norio; Umezawa, Hitoshi; Okushi, Hideyo; Yamasaki, Satoshi
卷第18卷
印刷ISSN0925-9635
文件大小550.42KB
发表时间2009-5
DOI10.1016/j.diamond.2009.01.033
页码782-785