[IEEE 2009 International Students and Young Scientists Workshop "Photonics and Microsystems" - Wernigerode, Germany (2009.06.25-2009.06.27)] 2009 International Students and Young Scientists Workshop "Photonics and Microsystems" - In situ measurements of the atomic layer deposition of high-k dielectrics by atomic force microscope for advanced microsystems
Kolanek, Krzysztof; Tallarida, Massimo; Karavaev, Konstantin; Schmeisser, Dieter
- 作者Kolanek, Krzysztof; Tallarida, Massimo; Karavaev, Konstantin; Schmeisser, Dieter
- 文件大小965.21KB
- 发表时间2009
- DOI10.1109/STYSW.2009.5470304
- 页码47-51