Double-Exposure Grayscale Photolithography
- 期刊名称Journal of Microelectromechanical Systems
- 作者Mosher, L.; Waits, C.M.; Morgan, B.; Ghodssi, R.
- 卷第18卷
- 期第2期
- 印刷ISSN1057-7157
- 电子ISSN1941-0158
- 文件大小650.70KB
- 发表时间2009-04
- DOI10.1109/jmems.2008.2011703
- 页码308-315
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