Influence of the sputtering pressure on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering
Hanfa, Liu; Huafu, Zhang; Chengxin, Lei; Changkun, Yuan
- 期刊名称Journal of Semiconductors
- 作者Hanfa, Liu; Huafu, Zhang; Chengxin, Lei; Changkun, Yuan
- 卷第30卷
- 期第2期
- 印刷ISSN1674-4926
- 文件大小162.14KB
- 发表时间2009-02
- DOI10.1088/1674-4926/30/2/023001