Effect of filament biasing on nanocrystalline-Si films deposited by hot wire chemical vapor deposition
- 作者Bibhu P. Swain; Bhabani S. Swain; Seung M. Yang; Nong M. Hwang
- 卷第255卷
- 期第11期
- 印刷ISSN0169-4332
- 文件大小1035.59KB
- 发表时间2009
- DOI10.1016/j.apsusc.2009.01.061
- 页码6033-6037
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