Piezoresistive Cantilever Optimization and Applications
- 期刊名称MRS Proceedings
- 作者Doll, Joseph C.; Park, Sung-Jin; Harjee, Nahid; Rastegar, Ali J.; Mallon, Joseph R.; Petzold, Bryan C.; Hill, Ginel C.; Barlian, A. Alvin; Pruitt, Beth
- 卷第1222卷
- 电子ISSN1946-4274
- 文件大小3765.53KB
- 发表时间2009-1
- DOI10.1557/PROC-1222-DD03-06
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