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[ECS 24th Symposium on Microelectronics Technology and Devices - Natal, Brazil (August 31 - September 3, 2009)] ECS Transactions - Characterization of Cu/Cu

[ECS 24th Symposium on Microelectronics Technology and Devices - Natal, Brazil (August 31 - September 3, 2009)] ECS Transactions - Characterization of Cu/Cu

Trevisan, Fernando; Santos Filho, Sebastião; Marques, Angelo; Martini, Sandro

作者Trevisan, Fernando; Santos Filho, Sebastião; Marques, Angelo; Martini, Sandro
文件大小254.96KB
发表时间2009
DOI10.1149/1.3183716
页码165-171

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