New Nb multi-layer fabrication process for large-scale SFQ circuits
- 作者S. Nagasawa; T. Satoh; K. Hinode; Y. Kitagawa; M. Hidaka; H. Akaike; A. Fujimaki; K. Takagi; N. Takagi; N. Yoshikawa
- 卷第469卷
- 印刷ISSN0921-4534
- 文件大小1133.69KB
- 发表时间2009
- DOI10.1016/j.physc.2009.05.219
- 页码1578-1584
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