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[ECS 24th Symposium on Microelectronics Technology and Devices - Natal, Brazil (August 31 - September 3, 2009)] ECS Transactions - Structural Characterization of Arsenic Implanted SOI

[ECS 24th Symposium on Microelectronics Technology and Devices - Natal, Brazil (August 31 - September 3, 2009)] ECS Transactions - Structural Characterization of Arsenic Implanted SOI

De Oliveira, Roana; Dalponte, Mateus; Boudinov, Henri

作者De Oliveira, Roana; Dalponte, Mateus; Boudinov, Henri
文件大小153.38KB
发表时间2009
DOI10.1149/1.3183699
页码37-42

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