Fabrication of Reliable RF MEMS Switches in CPW Configuration
- 期刊名称Advanced Materials Research
- 作者Sharma, Jaibir; DasGupta, Amitava
- 卷第74卷
- 电子ISSN1662-8985
- 文件大小592.34KB
- 发表时间2009-6
- DOI10.4028/www.scientific.net/AMR.74.259
- 页码259-263
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