Characterization of Phosphorus Implanted n+/p Junctions Integrated as Source/Drain Regions in a 4H-SiC n-MOSFET
- 期刊名称Materials Science Forum
- 作者Moscatelli, Francesco; Nipoti, Roberta; Poggi, Antonella; Solmi, Sandro; Cristiani, Stefano; Sanmartin, Michele
- 电子ISSN1662-9752
- 文件大小302.82KB
- 发表时间2009
- DOI10.4028/www.scientific.net/MSF.615-617.687
- 页码687-690
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