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Aluminum Doping by Low-Temperature Homoepitaxial Growth for Ni Ohmic Contacts to p-Type 4H-SiC

Krishnan, Bharat; Kotamraju, Siva Prasad; Melnychuk, Galyna; Merrett, Neil; Koshka, Yaroslav

期刊名称Materials Science Forum
作者Krishnan, Bharat; Kotamraju, Siva Prasad; Melnychuk, Galyna; Merrett, Neil; Koshka, Yaroslav
电子ISSN1662-9752
文件大小945.68KB
发表时间2009
DOI10.4028/www.scientific.net/MSF.615-617.581
页码581-584