Silicon surface passivation by hot-wire CVD Si thin films studied by in situ surface spectroscopy

J.J.H. Gielis; B. Hoex; P.J. van den Oever; M.C.M. van de Sanden; W.M.M. Kessels

作者J.J.H. Gielis; B. Hoex; P.J. van den Oever; M.C.M. van de Sanden; W.M.M. Kessels
卷第517卷
期第12期
印刷ISSN0040-6090
文件大小643.20KB
发表时间2009
DOI10.1016/j.tsf.2009.01.076
页码3456-3460

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