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Preparation of Uniform SiO<sub>2</sub> Films on Sapphire Dome by r.f. Magnetron Reactive Sputtering

Preparation of Uniform SiO₂ Films on Sapphire Dome by r.f. Magnetron Reactive Sputtering

Feng, Li Ping; Liu, Zheng Tang; Liu, Qi Jun; Li, Yang Ping

期刊名称Advanced Materials Research
作者Feng, Li Ping; Liu, Zheng Tang; Liu, Qi Jun; Li, Yang Ping
电子ISSN1662-8985
文件大小265.45KB
发表时间2009-8
DOI10.4028/www.scientific.net/amr.79-82.679
页码679-682

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