SPIE Proceedings [SPIE SPIE Scanning Microscopy - Monterey, CA (Monday 4 May 2009)] Scanning Microscopy 2009 - Recent progress in understanding the imaging and metrology using the helium ion microscope
- 作者Postek, Michael T.; Postek, Michael T.; Vladar, Andras E.; Newbury, Dale E.; Platek, S. Frank; Ming, Bin; Joy, David C.
- 卷第7378卷
- 印刷ISSN0277-786X
- 文件大小1926.59KB
- 发表时间2009
- DOI10.1117/12.824533
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