Automated Sample Preparation of Nanoscale Devices for FESEM
- 期刊名称Microscopy and Microanalysis
- 作者Cerchiara, RR; Fischione, PE; Boccabella, MF; Robins, AC
- 卷第15卷
- 印刷ISSN1431-9276
- 电子ISSN1435-8115
- 文件大小2208.59KB
- 发表时间2009-7
- DOI10.1017/s1431927609098651
- 页码1076-1077
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