Robust-Control-Relevant Coprime Factor Identification with Application to Model Validation of a Wafer Stage
- 期刊名称IFAC Proceedings Volumes
- 作者Oomen, Tom; van Herpen, Robbert; Bosgra, Okko
- 卷第42卷
- 期第10期
- 印刷ISSN1474-6670
- 文件大小420.54KB
- 发表时间2009
- DOI10.3182/20090706-3-fr-2004.00173
- 页码1044-1049
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