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[ASME ASME 2009 International Mechanical Engineering Congress and Exposition - Lake Buena Vista, Florida, USA (November 13–19, 2009)] Volume 12: Micro and Nano Systems, Parts A and B - On-Chip Young’s Modulus Characterization of the Effect of Phosphorus Heavy Doping on Polysilicon Thin Films

[ASME ASME 2009 International Mechanical Engineering Congress and Exposition - Lake Buena Vista, Florida, USA (November 13–19, 2009)] Volume 12: Micro and Nano Systems, Parts A and B - On-Chip Young’s Modulus Characterization of the Effect of Phosphorus Heavy Doping on Polysilicon Thin Films

Bassiachvili, E.; Nieva, P.; Khajepour, A.

作者Bassiachvili, E.; Nieva, P.; Khajepour, A.
文件大小389.68KB
发表时间2009
DOI10.1115/IMECE2009-13083
页码77-83

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