Internal stress in MPCVD diamond films on the Si substrate based on XRD line shape

• 作者Xiao-wei Li; Cui-ping Li; Cheng-yao Gao; Meng-xue Huang; Bao-he Yang
• 卷第5卷
• 期第4期
• 印刷ISSN1673-1905
• 电子ISSN1993-5013
• 文件大小135.53KB
• 发表时间2009-07
• DOI10.1007/s11801-009-8214-8
• 页码273-275