Fabrication of microstructures in III–V semiconductors by proton beam writing
- 作者F. Menzel; D. Spemann; J. Lenzner; W. Böhlmann; G. Zimmermann; T. Butz
- 卷第267卷
- 印刷ISSN0168-583X
- 文件大小743.57KB
- 发表时间2009
- DOI10.1016/j.nimb.2009.03.023
- 页码2321-2326
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