Recent developments in interferometry for microsystems metrology
- 作者Nandigana Krishna Mohan; Pramod K. Rastogi
- 卷第47卷
- 期第2期
- 印刷ISSN0143-8166
- 文件大小624.44KB
- 发表时间2009
- DOI10.1016/j.optlaseng.2008.08.009
- 页码199-202
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