Development of an alternating magnetic-field-assisted finishing process for microelectromechanical systems micropore x-ray optics
Riveros, Raul E.; Yamaguchi, Hitomi; Mitsuishi, Ikuyuki; Takagi, Utako; Ezoe, Yuichiro; Kato, Fumiki; Sugiyama, Susumu; Yamasaki, Noriko; Mitsuda, Kazuhisa
- 期刊名称ao/49/18/ao-49-18-3511.pdf
- 作者Riveros, Raul E.; Yamaguchi, Hitomi; Mitsuishi, Ikuyuki; Takagi, Utako; Ezoe, Yuichiro; Kato, Fumiki; Sugiyama, Susumu; Yamasaki, Noriko; Mitsuda, Kazuhisa
- 卷第49卷
- 期第18期
- 印刷ISSN0003-6935
- 电子ISSN1539-4522
- 文件大小1687.62KB
- 发表时间2010
- DOI10.1364/AO.49.003511