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[Ceramic Engineering and Science Proceedings] Advanced Processing and Manufacturing Technologies for Structural and Multifunctional Materials IV (Ceramic Engineering and Science Proceedings) || Mechanical Properties of Cr-Si-N-O Thin Films Deposited by RF Reactive Unbalanced Magnetron Sputtering

[Ceramic Engineering and Science Proceedings] Advanced Processing and Manufacturing Technologies for Structural and Multifunctional Materials IV (Ceramic Engineering and Science Proceedings) || Mechanical Properties of Cr-Si-N-O Thin Films Deposited by RF Reactive Unbalanced Magnetron Sputtering

Ohji, Tatsuki; Singh, Mrityunjay; Mathur, Sanjay

作者Ohji, Tatsuki; Singh, Mrityunjay; Mathur, Sanjay
文件大小806.25KB
发表时间2010
DOI10.1002/9780470944066.ch2
页码15-21

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