Three-dimensional fluid simulations on a line-shaped microwave plasma
Tsuji, Akihiro; Yasaka, Yasuyoshi
- 期刊名称Plasma Sources Science and Technology
- 作者Tsuji, Akihiro; Yasaka, Yasuyoshi
- 卷第19卷
- 期第6期
- 印刷ISSN0963-0252
- 电子ISSN1361-6595
- 文件大小2710.53KB
- 发表时间2010-12-01
- DOI10.1088/0963-0252/19/6/065017