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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Tactile and shear stress sensing array using capacitive mechanisms with floating electrodes

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Tactile and shear stress sensing array using capacitive mechanisms with floating electrodes

Cheng, M.-Y.; Lin, C.-L.; Yang, Y.-J.

作者Cheng, M.-Y.; Lin, C.-L.; Yang, Y.-J.
文件大小869.78KB
发表时间2010
DOI10.1109/MEMSYS.2010.5442525
页码228-231

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