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[IEEE 2010 First Workshop on Hardware and Software Implementation and Control of Distributed MEMS (DMEMS) - Besan, TBD, France (2010.06.28-2010.06.29)] 2010 First Workshop on Hardware and Software Implementation and Control of Distributed MEMS - 2D Planar Micro Manipulator by Stack-Integrated Micro Actuator/Sensor Array

[IEEE 2010 First Workshop on Hardware and Software Implementation and Control of Distributed MEMS (DMEMS) - Besan, TBD, France (2010.06.28-2010.06.29)] 2010 First Workshop on Hardware and Software Implementation and Control of Distributed MEMS - 2D Planar Micro Manipulator by Stack-Integrated Micro Actuator/Sensor Array

Ataka, Manabu; Fujita, Hiroyuki; Mita, Makoto
  • 作者Ataka, Manabu; Fujita, Hiroyuki; Mita, Makoto
  • 文件大小3864.42KB
  • 发表时间2010
  • DOI10.1109/dMEMS.2010.7
  • 页码6-10
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