X-ray microbeam strain investigation on Cu–MEMS structures
- 作者Olivier Perroud; Renaud Vayrette; Christian Rivero; Olivier Thomas; Jean-Sébastien Micha; Olivier Ulrich
- 卷第87卷
- 期第3期
- 印刷ISSN0167-9317
- 文件大小449.30KB
- 发表时间2010
- DOI10.1016/j.mee.2009.05.030
- 页码394-397
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