[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - San Francisco, CA, USA (2010.07.11-2010.07.13)] 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Device-design metrics to improve manufacturability
- 作者Peterson, Kirk; Logan, Ron; Yu, Xiaojun; Dezfulian, Kevin; Bazan, Greg; Winslow, Jon; Zamdmer, Noah; Dubuque, Lenny; Walsh, Brian; Norfleet, Andrew; Clougherty, Fran; Bayat, Ben; Mocuta, Anda; Rim, Ken
- 文件大小303.16KB
- 发表时间2010
- DOI10.1109/asmc.2010.5551444
- 页码179-183
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