[IEEE 2010 49th IEEE Conference on Decision and Control (CDC) - Atlanta, GA, USA (2010.12.15-2010.12.17)] 49th IEEE Conference on Decision and Control (CDC) - Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage
- 作者Oomen, Tom; Quist, Sander; van Herpen, Robbert; Bosgra, Okko
- 文件大小1919.25KB
- 发表时间2010
- DOI10.1109/cdc.2010.5717797
- 页码5530-5535
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